Department of Design and Production of Radio Electronic Equipment

National Technical University of Ukraine
"Igor Sikorsky Kyiv Polytechnic Institute"

Physical and technical bases of microsystems technology

Lecturer: Peregudov Sergey N.

Credits: 6

The discipline «Physical and technical bases of Microsystems technology» is studied in the 3rd year of the bachelor «Radioelectronic devices» and refers to the cycle of professional and practical Microsystems technology training. The main task of the course is to develop students’ knowledge in the field of microdevices processes physics; the understanding of the basic principles of microsystems components development, the ability to apply CAD methods for the physical processes simulation, to experimentally determine the main technical characteristics. This course is base for studying of professional disciplines: «Micro- and nanostructures simulation», «Microelectromechanics», «Microsystems and smart technologies design».

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